On Universality in Sputtering Yields Due to Cluster Bombardment.

نویسندگان

  • Robert J Paruch
  • Barbara J Garrison
  • Maksymilian Mlynek
  • Zbigniew Postawa
چکیده

Molecular dynamics simulations, in which atomic and molecular solids are bombarded by Arn (n = 60-2953) clusters, are used to explain the physics that underlie the "universal relation" of the sputtering yield Y per cluster atom versus incident energy E per cluster atom (Y/n vs E/n). We show that a better representation to unify the results is Y/(E/U0) versus (E/U0)/n, where U0 is the sample cohesive energy per atom or molecular equivalent, and the yield Y is given in the units of atoms or molecular equivalents for atomistic and molecular solids, respectively. In addition, we identified a synergistic cluster effect. Specifically, for a given (E/U0)/n value, larger clusters produce larger yields than the yields that are only proportional to the cluster size n or equivalently to the scaled energy E/U0. This synergistic effect can be described in the high (E/U0)/n regime as scaling of Y with (E/U0)(α), where α > 1.

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عنوان ژورنال:
  • The journal of physical chemistry letters

دوره 5 18  شماره 

صفحات  -

تاریخ انتشار 2014